RF MEMS electrostatically actuated tunable capacitors and their applications: a review

Rf Mems: Switches and Tunable Capacitors

RF MEMS is a key enabling device technology with the potential for significant performance, cost, and integration benefits to communications and radar applications. An overview of MEMS RF switches and tunable capacitors is presented, with examples of device technologies developed at RSC. Examples of MEMS-based circuits, including tunable filters and phase shifter circuits, are provided to illus...

RF MEMS and Their Applications

Electrostatically Actuated 2-dimensional Mems Micromirror

Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this p...

Modeling an Electrostatically Actuated MEMS Diaphragm Pump

The recent advent of microelectromechanical systems (MEMS) or micro-devices has generated excitement in many diverse fields. In the area of micro-fluidics liquid pumps are highly desirable for fluid transport and atomization. A recent and popular example of this is the inkjet, which self-aspirates ink from a reservoir and then transports it to a chamber for expulsion as a single droplet during ...

A MEMS-Actuated Tunable Microdisk Resonator

A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8dB and a quality factor of 6200.